Surface Roughness

surface particulates in deposited film
polishing artifacts

Spica Technologies uses a WYKO RST+ Optical Profiler for measurement of surface roughness. Equipped with numerous objectives, the system in it's PSI mode is able to measure roughness down to 3 Angstroms RMS. In the VSI mode, the system can measure rough surfaces as well as step heights and taper on many types of surfaces. The instrument's powerful software can calculate parameters such as Bidirectional Reflectance Distribution Function (BRDF), and Power Spectral Density (PSD) based on the surface data.